MM474: Science and Technology of Thin Films (2019-20)

MM474: Science and Technology of Thin Films (2019-20)

Course Name: Science and Technology of Thin Films

Course Code: MM474

Credits: 6

Course Instructor: Prof. Rajiv O Dusane

Course Type: Theory

Prerequisite: No formal prerequisites but knowledge of Structure of Materials (MM201) is recommended.
 
Course Content:

1. Vacuum components and systems.
2. Thin film deposition techniques: Physical and chemical vapour deposition techniques including molecular beam epitaxy, laser ablation and hot wire and microwave CVD techniques. 
3. Film contamination, cosine law of deposition, conformal coverage and line of sight deposition. 
4. Growth of thin films: Thermodynamic and kinetic considerations of deposition of thin films.
5. Characterization of thin films: Different methods of thickness measurements, electrical, optical, chemical and structural property determination.  

Books: Materials science of thin films, M. ohring, Academic press.

Lectures: Mostly slides are used in lectures. No attendance policy.
 

Exams:  2 quiz (15% each), misem (25%) and endsem (45%).
Exams are easy, but mostly theoritical questions are asked. Practical examples of thin film deposition discussed in class is mostly asked.

Personal Comments: Take this course if you are seriously interested in materials and want a lighter version of Thin Film Physics & Technology (PH 500). Involves very little mathematical practice.

Respondent: Kumar Shivam